Different Measuring Systems presented at the Site

The measurements at the FRT booth will be performed with the MicroProf 200 - an optical profilometer - and the confocal microscope MicroSpy Topo. The Topo is the entry level metrology tool from FRT which has been awarded with the German Industry Award in 2008. The tool determines rough, reflective and transparent surfaces with the highest possible resolution in 3D. The budget-friendly system is used for the analysis of roughness, contour and topography in labs and in production environments . For more specialized tasks the optical profilometer MicroProf 200 comes into play due to its versatility. It is equipped with FRT's exclusive Multisensor-Technology. It allows the combination of a variety of different measurement techniques such interferometry, confocal microscopy or atomic force microscopy in one universal measuring tool. This way it is possible to conduct profile, film thickness and nanometer resolution AFM measurements in just one efficient system. Based on the MicroProf and its Multisensor-Technology, FRT offers many turnkey ready solutions for a variety of different industries. An example is the fully automated inspection of MEMS wafers with regard to global parameters such as TTV, bow or warp as well as the characterization of local high-resolution analyses of step height or film-thickness. Individual measurement tasks on customer-specific wafer types can be easily adapted. A recently presented solution is the fully automated metrology tool for the characterization of membrane bow on MEMS wafers - all fully automated and supported by robotic wafer handling.

Fields of Application? - Virtually everywhere from R&D to production!

FRT metrology tools measure topography, structure, step height, roughness, abrasion, film thickness and many other parameters with high precision and repeatability. For this, FRT uses different sensor technologies - from the atomic force microscope to film thickness sensors up to interferometric and confocal types. The fields of application extend into many industries: efficiency-increasing surface structures on solar cells, surface roughness of artificial knee joints in the field of medical technology, the honing structure inside an engine's cylinder or very specific investigations on MST/MEMS products. All these are just a snapshot of the application versatility that can be offered. FRT at the Hannover Messe Visit FRT in Hall 6, Booth E16/F3. No appointments for test measurements necessary.