| Metrology for Frontend (view product movie) |
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The measuring systems series MFE (metrology front end) is particularly suited to manufacturers of structured wafers, masks, MEMS and similar products. Because of the very high cleanliness, process and yield requirements, all tools are especially designed for use in cleanrooms.
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| MicroGlider® |
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The MicroGlider® measures profile, topography, roughness, and coating thickness with further enhanced accuracy. The MicroGlider® is also equipped with a CCD camera for easy sample positioning and can automatically perform pre-defined measurements.
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| MicroGlider® Asphere |
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The MicroGlider® Asphere employs a unique method to perform highly precise profile measurements on spherical and aspherical lenses. The lens is fixed by a holder, which is mounted on an air bearing rotary table. The system configuration is such that the sensor is always perpendicular to the lens surface, which is rotated during measurement.
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| MicroProf® |
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The MicroProf® is a very versatile and modular measuring tool that is suited for a wide range of applications. No matter what you are planning to measure, whether it is profile, roughness, topography or film thickness, this system is a true all-rounder. Most importantly, it is very easy to use, expandable, can be automated and provides instant visible results from a time - and cost efficient operation.
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| MicroProf® Mobile |
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The MicroSpy® Mobile is, as a portable unit, perfectly suited for direct surface measuring on heavy machinery, vehicles, cylinders, glass panes and so forth. This measuring system enables you to perform non-destructive, high-resolution surface analysis on-site and provides you with valuable information such as wear, bearing curves and volumes.
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| MicroProf® TTV |
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The MicroProf® TTV quickly measures both sides of a part simultaneously or total thickness variation (TTV) as well as the roughness, contour and topography on both surfaces. Exchangeable part holders can be used to measure different samples such as wafers, dies, optics, foils, sheet metal, etc. Equipped with pattern recognition software, the MicroProf® TTV can be fully automated with measuring sequences and part handling.
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| MicroProf® Twist |
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The MicroProf® Twist was especially designed for the metrological measurement of cylindrical parts such as axes, cam lobes, cylinder sleeves, bearing sleeves (inside and outside), valve tappets, crankshafts, piston rods and other similar samples. Since this measuring system is capable of automated measurements, it can be easily integrated for process control into your existing production lines.
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| MicroProf® Vision |
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The MicroProf® Vision combines the well-known accuracy and reproducibility of the MicroProf® series with the ability to fully automate surface inspection in production environments. By utilizing a high resolution, telecentric, illuminated CCD-camera
and a pattern recognition software, the MicroProf® Vision automatically detects different parts and measurements sites and thus saves you valuable time for routine, repetitive measurements.
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| MicroProf® Cylinder |
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The MicroProf® Cylinder Measuring Station is a specialized system for the automotive industry. It enables you to perform non-destructive measurements in engine block cylinder bores (topography, roughness, honing structure, bearing curve, oil retention volume, wear volume and more).
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| Custom Solutions |
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In addition to the standard measuring systems, FRT designs and manufactures highly specialized solutions for applications in demanding production environments. Over many years, FRT has developed the competence to engineer and integrate metrological systems into third-party tools and to design entire process monitoring systems by carefully selecting only the best hardware and writing custom software.
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