MicroGlider

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MicroGlider® Series - System Overview
The MicroGlider® Series is the highly precise, multi-sensor platform measuring system from FRT intended for especially accurate measuring applications. A linear motor driven, non-contact air bearing x-y stage guarantees best precision motion during stage movement.
MicroGlider® MicroGlider® - Air cushioned and highly precise
  The MicroGlider® measures profile, topography, roughness,
and coating thickness with further enhanced accuracy.
The MicroGlider® is also equipped with a CCD camera for
easy sample positioning and can automatically perform
pre-defined measurements.