The MicroGlider® is the highly precise, multi-sensor platform measuring system from FRT intended for especially accurate measuring applications. A linear motor driven, non-contact air bearing x-y stage guarantees best precision motion during stage movement. Hence the MicroGlider® measures profile, topography, roughness, and coating thickness with further enhanced accuracy. The MicroGlider® is also equipped with a CCD camera for easy sample positioning and can automatically perform predefined measurements. |