MicroProf
MicroProf TTV

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MicroProf® TTV - Simultaneous Measurement on both Sides

The MicroProf® TTV quickly and simultaneously measures both sides
of a part for thickness and total thickness variation (TTV) as well as 
for roughness, profile and topography on both surfaces. This is 
achieved by two opposing sensors, which are situated above
and below an open frame, raster x-y stage.

Exchangeable part holders can be used to measure different
samples such as wafers, dies, optics, foils, sheet metal, etc.
Equipped with pattern recognition software, the MicroProf® TTV
can be fully automated with measuring sequences and part handling.

 
 
SensorsAvailable Sensors
FRT Brochure

FRT Brochure

Software Package FRT Software Package  


automation software
editing of measuring positionsTTV sensor configuration
automation software
editing of measuring positions
TTV sensor configuration


Features

  • measurement of total thickness variations (resolution < 10nm)
  • simultaneous two-side measuring of roughness, contour and topography
  • suited for use in production environments
  • automatic pattern recognition
  • excellent resolution
  • outstanding repeatability and reproducibility
  • automated measuring cycles
  • multi-sensor capability
  • non-destructive measurement

Hardware

  • protective enclosure
  • two chromatic white light or AFM sensors
  • high resolution, telecentric, and illuminated CCD camera
  • compact x,y stage with open framecustomized part holder
    (i.e. wafer holder)
  • stage size x-y : 410 x 300 mm2  or 250 x 200 mm2
  • larger stage sizes available upon requesthigh precision
    mechanical axes
  • backlash-free, re-circulating ball spindles
  • high resolution linear encoder systems
  • rugged and stable granite mount
  • industrial computer, monitor, electronics, and manual
Software

  •  FRT Acquire Measuring Software
  • controllable through recipes (with device editor)
  • macro collection for typical measuring applications
  • automation of complex measurements
  • intuitive user interface design

  •  FRT Mark III Analysis Software
  • complete analysis of the generated data (2D and 3D)
  • logging of analysing steps and results
  • customizable reports
  • various data import and export formats
  • English and German language sets
  • free updates