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The MicroProf® is a very versatile and modular measuring tool that is suited for a wide range of applications. No matter what you are planning to measure, whether it is profile, roughness, topography or film thickness, this system is a true all-rounder. Most importantly, it is very easy to use, expandable, can be automated and provides instant visible results for a time - and cost efficient operation.
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| measurement of metal surface |
profile of an embossed structure |
structures on a semiconductor part |

- non-destructive measurement
- excellent resolution
- outstanding repeatability and reproducibility
- automated measuring cycles
- sample positioning with CCD camera
- versatility through modular conception
- multi-sensor capability

- chromatic white light or AFM sensor
- compact x,y stage for perfect orthogonality
- high precision mechanical axes
- high resolution linear glass scales
- backlash-free, re-circulating ball spindles
- rugged and stable granite mount
- industrial computer, monitor, electronics, and manual
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- FRT Acquire Measuring Software
- macro collection for typical measuring applications
- automation of complex measurements
- intuitive user interface design
FRT Mark III Analysis Software
- complete analysis of the generated data (2D and 3D)
- logging of analysing steps and results
- customizable reports
- various data import and export formats
- English and German language sets
- free updates
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