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The MicroSpy® Profile is a budget-friendly single-sensor optical profilometer for non-contact 2D und 3D surface measurements.
The tool is used in R&D as well as industrial production control across many industries from medical technology, automotive, semiconductors, PV, MEMS, optics and more. |
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Backside metallization of a solar cell
Left: 3D topography, right: 2D profile of metallization |
Left: Roughness evaluation according to DIN ISO
Right: 3D topography of a MEMS structure |
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Notably versatile
- For surfaces from smooth to very rough,
absorbing to reflective or transparent
- Powerful and long-lasting LED light source
- Resolution down to the nanometer
- Low maintenance as there are no moving parts in the sensor
- Sensors with different measuring ranges available
Notably cost-effective
The FRT MicroSpy® Profile is designed to be
cost-effective and powerful at the same time.
- Attractive purchase price
- Low follow-up costs for training, service and spare parts
- Small footprint
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Notably user-friendly
- Integrated CCD-camera
- Live camera picture of measuring area in acquisition software
- Selection of measuring area with mouse
- Easy to use evaluation software FRT Mark III
- Various functions for visualization, analysis and reporting
Notably powerful
- Fast, non-contact measurement
- Motorized x,y-measuring area 50 mm x 50 mm
- Manual sensor approach through precise z-axis
- Depending on selected sensor, height measuring ranges
from 300 μm to 3 mm und a maximal vertical resolution
of 3 nm are available |
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