MicroSpy® Topo - Confocal Microscope

Application Versatility 

  • Measurement of rough, reflective and transparent surfaces
  • High angular acceptance
  • Stitching mode for measuring field enlargement

The confocal measuring principle which comes to use in this system is an established, contact-free approach for the analysis of roughness, contour and topography in a multitude of lab and production control scenarios.


Fast and Intuitive Operation  

  • Acquisition of high-resolution measuring data in five easy steps
  • Typical measuring times are far less than a minute

Beside superior precision, also high measuring speed and intuitive operation are important objectives for the development of FRT measuring tools. This way the user is able to quickly conduct productive analyses and reports.


Highly Productive Hard and Software

  • Outstanding height resolution in the nanometer range
  • Excellent depth-of-focus, sharp imagery at any focal position
  • Long-lasting and low-maintenance LED light source
  • Complete software package for data acquisition, analysis
    and reporting

The scope of delivery consists of the measuring system with a motorized x,y stage for sample positioning, a high-performance PC with TFT display and an operation manual.

Remarkable in this class of confocal microscopes is the use of high-quality granite for the entire system. This way we ensure, just like with all FRT products, a maximum of structural and thermal stability.


         Downloads

 

MicroSpy Topo / Confocal Microscope

The FRT MicroSpy® Topo is the cost-efficient confocal microscope for fast and contact-free surface analyses. Ask for a quote now.

 

MicroSpy Topo / Konfokalmikroskop
The MicroSpy® Topo stands out due to its high angular acceptance and its ability
to perform on rough, reflective and transparent specimen.

 

MicroSpy Topo / Konfokalmikroskop
Back side metallization of a solar wafer (L), Groove in wafer polishing disc (R)

MicroSpy Topo / Konfokalmikroskop
Precision linear measuring scale made of glass (L), Groove calibration standard (R)


 
Measuring System  
System Design base and sensor-mount made of high-quality granite
Sample Positioning high-precision stage with joystick control, travel range 100 x 100 x 30 mm (x,y,z)
Footprint 570 x 400 x 730 mm (h,w,d)
Total Weight 125 kg (screw-on transport handles included)
Power Supply 100-240V, 50-60 Hz, 25 VA
 
Lenses 1 10X 20X 50X 100X
Working Distance (mm) 1 1 1 1
Resolution z (nm) 10 3 2 1
Resolution x, y (μm) 1.98 1 0.396/0.422 0.198/0.372
Measuring Field (μm) 1520 x 1140
760 x 560
304 x 228
152 x 114
Numerical Aperture 0.5 0.75 0.,8 0.9
 
Software Package  
Data Acquisition fast measurements in just 5 steps, typical measuring time < 1 minute, stitching mode
Data Analysis (FRT Mark III) 3 analysis of profile, topography, roughness, step height as
well as many 2D and 3D filter- und evaluation routines
Reporting customizable reports, customizable input fields for adding additional information to reports from user input
Languages German / English (switchable)

 1
Scope of delivery includes 1 lens of choice

 2 Geometric / optical (Rayleigh Criterion)
 3 Exportformats: ASCII, Autocad DXF, CSV, BMP, JPG, PNG, TIF