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MicroSpy® Topo DT - Dual Technology 3D Measuring Microscope

Versatile and Powerful 

  • measurement of up to 37 mm2 in < 10 seconds
  • 3D-measurements with micro- and nanometer resolution
  • for dispersive, reflective, and transparent surfaces
  • for minimally and strongly structured surfaces
  • measurement of roughness, contour, 3D topography, planarity, and much more

Depending on the measuring task, the MicroSpy® Topo DT is
operated as a confocal microscope or white light interferometer. Both technologies work in a non-contact and non-destructive fashion. Impressive and reliable measuring results are generated within seconds.


Confocal Measuring Mode  

  • awarded confocal measuring technology
  • robust and easy to use
  • excellent depth of field without defocused image parts
  • field of view can be extended by stitching


Interferometric Measuring Mode

  • Vertical-Scanning-Interferometry (VSI-Mode) flat surfaces with sporadic, large vertical height differences
  • Phase-Shift-Interferometry(PSI-Mode) very flat surfaces on glass, lenses or polished wafers especially for planarity measurements


Scope of Delivery

  • 2 lenses (20 x confocal, 50 x interferometric)
    in turret for up to 6 lenses
  • long-life, low-maintenance LED light source
  • high-grade computer with TFT monitor for data acquisition and analysis
  • FRT Mark III software package (for analysis and reporting)
  • motorized x, y precision sample stage
  • stable granite base
  • user manual

         Downloads

 

MicroSpy Topo DT / Dual Technology 3D Measuring Microscope

FRT MicroSpy® Topo DT is a 3D measuring microscope with confocal and interferometric technology for fast and non-contact surface analyses.

Request further information!

MicroSpy Topo DT 3D Digital Measuring Microscope
The MicroSpy® Topo DT is versatile and powerful because it can be used to measure rough, reflective, transparent or even very flat surfaces on many specimen.

left: 3D topography of a diamond structure (confocal measurement), right: 3D topography of a chromium structure (interferometric measurement)
left: 3D topography of a diamond structure (confocal measurement)

right: 3D topography of a chromium structure (interferometric measurement)

left: 3D topography of a medical stent (confocal measurement), right: 3D topography of a groove calibration standard (interferometric measurement)
left: 3D topography of a medical stent (confocal measurement)

right: 3D topography of a groove calibration standard (interferometric measurement)


MicroSpy® Topo DT

3D Digital Measuring Microscope with Dual-Technology

Height Measuring Range (μm)

180 μm (larger ranges optional)

Camera / Illumination

768 x 582 pixel (up to 48 images/s) with reflected-light mode *1, high-power LED with 505nm (blue-green)

System Design

base and sensor-mount made of high-quality granite

Sample Positioning

precision stage with joystick control and optional tilt-functionality, travel range 100 mm x 100 mm (x,y)

Footprint

570 x 400 x 730 mm (h,w,d)

Total Weight

125 kg (screw-on transport handles included)

Power Supply

100-240V, 50-60 Hz, 25 VA


Lenses for Confocal Microscope

10 x

20 x

50 x

100 x

Working Distance (mm)

1

1

1 *2

1 *2

Resolution z (nm)

10

3

2

1

Resolution x, y (μm)

2.31

1.16

0.463/0.42 *3

0.231/0.37 *3

Measuring Field (μm)

1780 x 1335

890 x 655

356 x 267

178 x 134

Numerical Aperture

0.5

0.75

0.8

0.9


Lenses for Interferometer

2.5 x *3

5 x *3

10 x *4

20 x *4

50 x *4

100 x *4

Working Distance (mm)

10.3

9.3

7.4

4.7

3.4

2.0

Resolution z (nm)

1

1

1

0.1

0.1

0.1

Resolution x. y (μm)

9.24

4.62

2.31

1.16

0.463/0.61 *5

0.231/0.48 *5

Measuring Field (μm)

7120 x 5340

3560 x 2670

1780 x 1335

890 x 655

356 x 267

178 x 134

Numerical Aperture

0.075

0.13

0.3

0.4

0.55

0.7


Software Package

 

Data Acquisition

fast measurements in just 5 steps, typical measuring time < 10 seconds, stitching mode

Data Analysis (FRT Mark III)*6

analysis of profile and topography, roughness, step height as well as
many 2D and 3D filter and evaluation routines

Reporting

customizable reports, customizable input fields for adding additional information to reports from user input

Languages

German / English (switchable)

 
*1 Megapixel camera optionally available
*2 Long distance lenses with larger working distance optionally available
*3 Michelson lens
*4 Mirau lens
*5 geometric / optical (Rayleigh criterion)
*6 export file formats: ASCII, DXF, CSV, BMP, JPG, PNG, TIF, AVI