FRT CFM - Sensor for Confocal Microscopy - Fries Research & Technology

The confocal measuring principle used in the FRT CFM sensor is an established, non-contact, measuring method for very fast, high-resolution 3D analyses of small structures in research and production like MEMS, microlenses, defects and more. Beside the investigation of microstructures, the sensor is also used for roughness measurements and the capture and analysis of 3D topography. Due to its large-area, confocal measuring principle, meaningful results are generated in less than 10 seconds. The field of view can be extended through the integrated stitching function.

Eigenschaften

Optical, non-contact, non-destructive measurement
Very fast, large-area measurement
Nanometer vertical resolution, sub-micrometer lateral resolution
Extendible field of view through stitching
Durable, low-maintenance LED light source

Typische Anwendungen

Structure measurement
Roughness measurement
3D topography measurement

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Product Sheet
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Objective ¹⁾	10X	20X	50X	100X
Working distance	1 mm
Resolution z	10 nm	3 nm	2 nm	1 nm
Resolution x.y	2.31 µm	1.16 µm	0.463 µm / 0.42 µm ²⁾	0.231 µm / 0.37 µm ²⁾
Field of view	1780 µm x 1335 µm	890 µm x 655 µm	356 µm x 267 µm	178 µm x 134 µm
Numerical aperture	0.5	0.75	0.8	0.9
Measuring angle	90° ± 30°	90° ± 48°	90° ± 53°	90° ± 64°
1) Further objectives available (e.g. long-distance) 2) Geometric / optical

Sensor
Camera	768 x 582 Pixel
Travel range z	400 µm
Typical measuring time	5 - 10 sec.
Light source	LED, 505 nm, 5 W
Operating temperature	25° C ± 2° C
Dimensions (W x H x D)	140 mm x 450 mm x 140 mm

Scope of Delivery
Measuring head, one objective of choice, operating manual