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The FRT CWL is a fast, optical distance measurement sensor that can be precisely configured for the given application. For this, there is a choice of standard and special sensor heads with different measuring ranges available. The non-destructive working principle of the FRT CWL performs equally well on surfaces with high and low reflectivity. Due to its bright light source and a measuring rate of up to 14 kHz, the sensor is used for a variety of applications in industrial production control and R&D. Up to 16 different measuring heads can be calibrated on one sensor electronics and be used exclusively as required.
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- Optical, non-contact, non-destructive measurement
- High measuring rate up to 14 kHz
- Bright, small measuring spot
- High lateral and vertical resolution
- Excellent signal/noise ratio
- Small, robust, wear-free measuring head
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- 2D profile measurement
- 3D topography measurement
- Step height measurement
- Roughness and planarity measurement
- Structure and contour measurement
- quality checks in front-end and back-end fabrication of
semiconductors (e.g. wafer, die, packages)
- R&D and quality control in micro systems engineering
(e.g. MEMS, inkjet print heads)
- R&D and quality control in medical technology
(e.g. stents, catheters, prothesises)
- quality checks in the automotive industry
(e.g. interior, cylinders, shafts)
- quality checks of circuit boards, injection moulding (micro-)parts,
optical components (e.g. lenses)
- profile and 3D-measurements on heavily structured surfaces
(e.g. tools, rollers, components)
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| Measuring range z1) |
300 µm |
600 µm |
1 mm |
3 mm |
6 mm |
10 mm |
| Working distance |
4.5 mm |
6.5 mm |
20 mm |
22 mm |
35 mm |
70 mm |
| Resolution z 2) |
3 nm |
6 nm |
10 nm |
30 nm |
60 nm |
100 nm |
| Resolution x.y |
2.5 µm |
2 µm |
1.8 µm |
6 µm |
8 µm |
12 µm |
| Numerical Aperture |
0.5 |
0.5 |
0.7 |
0.5 |
0.43 |
0.33 |
| Measuring angle 3) |
90° ± 30° |
90° ± 30° |
90° ± 45° |
90° ± 30° |
90° ± 25° |
90° ± 20° |
1) Further measuring ranges available
2) Maximum resolution based on reduced measuring range
3) Diffusive surfaces allow for wider measuring angles |
| Sensor electronics |
CWL |
CWL F |
CWL X |
| Measuring rate |
2.000 measurements / sec. (2 kHz) |
4.000 measurements / sec. (4 kHz) |
14.000 measurements / sec. ( kHz) |
| Light source |
LED |
Halogen lamp |
Xenon high-pressure lamp |
| Repeatability |
< 0,00009 x Messbereich |
| Measuring accuracy |
< 0,00033 x Messbereich + 0,001 x Messhöhe |
| Calibration tables |
16 |
| Operating temperature |
+ 5° C to + 50° C |
| Dimensions (W x H x D) |
200 mm x 100 mm x 93 mm |
260 mm x 115 mm x 310 mm |
360 mm x 160 mm x 400 mm |
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| Scope of Delivery |
| Measuring head, optical fiber, sensor electronics, operating manual | |
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