|
 The CWL is based on the principle of chromatic distance measurement. White-light is focused on the surface by a measuring head with a strongly wavelength-dependent focal length. The spectrum of the light scattered on the surface generates a peak in the spectrometer.
The wavelength of this peak is used to determine the height on the sample. The sensor works on transparent, highly reflective or even matt black surfaces. It is extremely fast and has virtually no edge effects. | 
|  | | |
- non-contact, non-destructive measurement
- very high resolution possible due to small spot
- suited for use in difficxult ambient conditions
- coaxial measurement, no edge effects
- small, wear-free sensor without moveable parts
|
|  | | |
- quality checks in front-end and back-end fabrication of
semiconductors (e.g. wafer, die, packages) - R&D and quality control in micro systems engineering
(e.g. MEMS, inkjet print heads)
- R&D and quality control in medical technology
(e.g. stents, catheters, prothesises) - quality checks in the automotive industry
(e.g. interior, cylinders, shafts) - quality checks of circuit boards, injection moulding (micro-)parts,
optical components (e.g. lenses) - profile and 3D-measurements on heavily structured surfaces
(e.g. tools, rollers, components)
|  | | | measuring range z*
| 300 µm
| 600 µm | 3 mm | 10 mm | 25 mm
| | measuring principle | chromatic white light measurement | | working distance | 4.5 mm | 6.5 mm | 20 mm | 70 mm | 80 mm | | max. resolution z* | 3 nm | 6 nm | 30 nm | 100 nm | 250 nm | | resolution x,y | 1 - 2 µm | 1 - 2 µm | 5 - 6 µm | 12 µm | 14 µm | | measuring angle** | ca. 90° ± 30° | ca. 90° ± 30° | ca. 90° ± 30° | ca. 90° ± 20° | ca. 90° ± 15° |
* Maximum resolution based on reduced measuring range.
** Diffusive surfaces allow for wider measuring angles.
|
|
|
