|
| The FRT WLI FL is an optical 3D field-of-view sensor based on the measuring principle of white light interferometry. It features fast, large area topography measurements with excellent height resolution in the sub-nanometer range. In Phase-Shift-Mode (PSI), the sensor is ideal for roughness measurements on flat surfaces. Topography measurements are conducted with high resolution in vertical scanning mode (VSI). Typical applications are the investigation of micro-mirrors, lenses, MEMS, microfluidics and microelectronics.
|
|
 |
| |
- Non-contact, non-destructive measurement
- Very fast 3D measurement of large areas with one shot
- Sub-nanometer height resolution
- Nanometer vertical resolution independent from objective type
- Especially suited for the measurement of very smooth or polished surfaces
|
|
 |
| |
- roughness measurement in nm-range, e.g. on optical components such as mirrors or lenses
- evaluation of micro structures (e.g. MEMS, microfluidics, microoptics)
- measurement of step-height in the field of semiconductors
- measurement on different materials (e.g. metal, semiconductors, glass, plastics, paper, lacquers, and coatings)
- measurement on liquids
|
 |
| |
|
Objektive (Mirau)
|
10x |
20x |
50x |
| Measuring range z 1) |
96 µm |
| Working distance |
3.6 mm |
3.6 mm |
1.7 mm |
| Resolution z |
0.1 nm |
| Resolution x,y |
2.5 μm |
1.25 μm |
0.5 μm |
| Field of view |
1.6 mm x 1.2 mm |
0.8 mm x 0.6 mm |
0.32 mm x 0.24 mm |
|
1) Optionally up to 396 μm
Operating temperature: 5°C – 40°C
|
| Scope of Delivery |
| Measuring head, 10x and 20x objektive, sensor electronics, operating manual |
|
|
|
